Using a MicroElectromechanical System (674 words, 3 pages)
In this paper, microelectromechanical system (MEMS) has been utilized to make miniaturized ion optics required for making the portable all-in-one mass spectrometer. Four different ion optics components were fabricated using deep-reactive ion etching (DRIE) of n-doped silicon-on-insulator. These components are 1 mm Bradbury-Nielsen gate, 500 m coaxial ring ion trap ...
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