Physics and Chemistry of Plasma Molecules (279 words, 1 pages)
In this paper, we present a critical review of essential data on thephysics and chemistry of low pressure glow discharges of GeH4 that are usedto deposit hydrogenated amorphous germanium films (a-GeH). Here, weanalyze the surface processes and reaction probabilities of molecules, ionsand radicals. Gas phase elementary processing analysis is conducted ...
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